Freescale Semiconductor Electronic Components Datasheet

MPXH6400A Datasheet

Silicon Pressure Sensor

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Pressure

MPXH6400A

Rev 3, 07/2009

High Temperature Accuracy

Integrated Silicon Pressure Sensor

for Measuring Absolute Pressure,

MPXA6400A

MPXH6400A

Series

On-Chip Signal Conditioned,

Temperature Compensated

20 to 400 kPa (3.0 to 58 psi)

0.2 to 4.8 V Output

and Calibrated

The Freescale MPXH6400A series sensor integrates on-chip, bipolar op amp

circuitry and thin film resistor networks to provide a high output signal and

temperature compensation. The small form factor and high reliability of on-chip

integration make the Freescale pressure sensor a logical and economical choice for

the system designer.

The MPXH6400A series piezoresistive transducer is a state-of-the-art, monolithic,

signal conditioned, silicon pressure sensor. This sensor combines advanced

micromachining techniques, thin film metallization, and bipolar semiconductor

processing to provide an accurate, high level analog output signal that is

proportional to applied pressure.

Application Examples

• Industrial Controls

• Engine Control/Manifold Absolute

Pressure (MAP)

Features

• Improved Accuracy at High Temperature

• Available in Small and Super Small Outline Packages

• 1.5% Maximum Error over 0° to 85°C

• Ideally suited for Microprocessor or Microcontroller-Based Systems

• Temperature Compensated from -40° to +125°C

• Durable Thermoplastic (PPS) Surface Mount Package

ORDERING INFORMATION

Device Name

Package

Options

Case

No.

# of Ports

None Single Dual

Super Small Outline Package (MPXH6400A Series)

Gauge

Pressure Type

Differential Absolute

MPXH6400A6U

Rails

1317

•

MPXH6400A6T1

Tape and Reel 1317

•

MPXH6400AC6U

Rails

1317A

•

MPXH6400AC6T1 Tape and Reel 1317A

•

Small Outline Package (MPXA6400A Series)

MPXA6400AP

Tray

1369

•

Device

Marking

MPXH6400A

MPXA6400AP

SUPER SMALL OUTLINE PACKAGES

SMALL OUTLINE PACKAGE

MPXH6400A6U/6T1

CASE 1317-04

MPXH6400AC6U/C6T1

CASE 1317A-04

MPXA6400AP

CASE 1369-01

Freescale Semiconductor Electronic Components Datasheet

MPXH6400A Datasheet

Silicon Pressure Sensor

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Pressure

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OPERATING CHARACTERISTICS

(VS = 10 Vdc, TA = 25°C unless otherwise noted, P1 > P2)

Characteristic

Symbol

Min

Typ

Max Unit

Pressure Range

Supply Voltage(1)

Supply Current

Minimum Pressure Offset

@ VS = 5.0 Volts(2)

Full Scale Output

@ VS = 5.0 Volts(3)

Full Scale Span

@ VS = 5.0 Volts(4)

Accuracy(5)

Sensitivity

Response Time(6)

Warm-Up Time(7)

Offset Stability(8)

(0 to 85°C)

POP

Voff

VFSO

VFSS

—

V/P

—

4.64

—

0.133

4.733

4.467

—

5.0

6.0

0.2

4.8

4.6

—

12.1

1.0

± 0.25

400

5.36

0.267

4.866

4.733

±1.5

—

kPa

Vdc

mAdc

Vdc

%VFSS

mV/kPa

%VFSS

1. Device is ratiometric within this specified excitation range.

2. Offset (Voff) is defined as the output voltage at the minimum rated pressure.

3. Full Scale Output (VFSO) is defined as the output voltage at the maximum or full rated pressure.

4. Full Scale Span (VFSS) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the

minimum rated pressure.

5. Accuracy is the deviation in actual output from nominal output over the entire pressure range and temperature range as a percent of span

at 25°C due to all sources of error including the following:

Linearity:Output deviation from a straight line relationship with pressure over the specified pressure range.

Temperature Hysteresis:Output deviation at any temperature within the operating temperature range, after the temperature is cycled to and

from the minimum or maximum operating temperature points, with zero differential pressure applied.

Pressure Hysteresis:Output deviation at any pressure within the specified range, when this pressure is cycled to and from the minimum or

maximum rated pressure, at 25°C.

TcSpan:Output deviation over the temperature range of 0 to 85°C, relative to 25°C.

TcOffset:Output deviation with minimum rated pressure applied, over the temperature range of 0 to 85°C, relative to 25°C.

Variation from Nominal:The variation from nominal values, for Offset or Full Scale Span, as a percent of VFSS, at 25°C.

6. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to a

specified step change in pressure.

7. Warm-up Time is defined as the time required for the product to meet the specified output voltage after the Pressure has been stabilized.

8. Offset Stability is the product's output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test.

MPXH6400A

Sensors

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MPXH6400A Datasheet

Silicon Pressure Sensor

MPXH6400A Datasheet

Silicon Pressure Sensor

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