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Freescale Semiconductor Technical Data
MPX2102 Rev 5, 10/2006
100 kPa On-Chip Temperature Compensated & Calibrated Silicon Pressure Sensors
The MPX2102/MPXV2102G series device is a silicon piezoresistive pressure sensor providing a highly accurate and linear voltage output directly proportional to the applied pressure. The sensor is a single, monolithic silicon diaphragm with the strain gauge and a thin-film resistor network integrated on-chip. The chip is laser trimmed for precise span and offset calibration and temperature compensation.