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Intersema

MS761 Datasheet Preview

MS761 Datasheet

PRESSURE SENSOR DIE

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MS761
PRESSURE SENSOR DIE (0-1 BAR)
0 to 100 kPa bar range (1 bar or 14.5 PSI)
High Sensitivity
ROHS-Compatible & Pb-free1
DESCRIPTION
The sensor element of the MS761A consists of a silicon micro-machined membrane with a Pyrex glass mounted
under vacuum. Implanted resistors make use of the piezo-resistive effect. The absolute pressure sensor
(MS761-A) carries a sealed vacuum reference cavity underneath the membrane whereas the differential sensor
(S-761-D) has a hole in the Pyrex glass at the backside of the sensor.
FEATURES
Uncompensated pressure sensor die
High Sensitivity: Output Span 240 mV @ 5V
Temperature Range -40°C …+ 125°C
Linearity 0.15 % (typical)
Small Die Size 2.00 X 1.86 mm
Low cost, High reliability
APPLICATION
For high resolution absolute sensor systems
Engine Controls
Barometers, Altimeters, Variometers
ELECTRICAL CONNECTIONS
Positive output for pressure applied topside
Vs+ EPI
Out+
Out-
GND1 GND2
Vs+ : Supply voltage of Wheatstone bridge
Epi : Connection of epitaxial layer (membrane)
Out- : Negative output
Out+ : Positive output
GND1 : Ground
GND2 : Ground
1 The European RoHS directive 2002/95/EC (Restriction of the use of certain Hazardous Substances in electrical and electronic equipment)
bans the use of lead, mercury, cadmium, hexavalent chromium and polybrominated biphenyls (PBB) or polybrominated diphenyl ethers
(PBDE).
DA761_002.doc
00000761348
ENC922
May 9, 2007
1/4




Intersema

MS761 Datasheet Preview

MS761 Datasheet

PRESSURE SENSOR DIE

No Preview Available !

PAD OUT
Vs+
Epi Out-
Out+
LAYOUT
GND1 GND2
MS761A
Important remarks:
As the sensing elements are diffused resistances, the voltage
applied on the ground pads (GND1 and GND2) has to be lower
than the voltage applied on supply voltage pad (Vs+).
The epitaxial layer is connected to the Vs+ pin on the die
MS761D
Bondable area = 100 x 100 um
DA761_002.doc
00000761348
ENC922
May 9, 2007
Bondable area = 100 x 100 um
2/4


Part Number MS761
Description PRESSURE SENSOR DIE
Maker Intersema
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