Datasheet Summary
PRESSURE SENSOR DIE (0-1 BAR)
- 0 to 100 kPa bar range (1 bar or 14.5 PSI)
- High Sensitivity
- ROHS-patible & Pb-free1
DESCRIPTION
The sensor element of the MS761A consists of a silicon micro-machined membrane with a Pyrex glass mounted under vacuum. Implanted resistors make use of the piezo-resistive effect. The absolute pressure sensor (MS761-A) carries a sealed vacuum reference cavity underneath the membrane whereas the differential sensor (S-761-D) has a hole in the Pyrex glass at the backside of the sensor.
Features
- Unpensated pressure sensor die
- High Sensitivity: Output Span 240 mV @ 5V
- Temperature Range -40°C …+ 125°C
- Linearity 0.15 % (typical)
- Small Die...