• Part: MS761
  • Description: PRESSURE SENSOR DIE
  • Manufacturer: Intersema
  • Size: 240.19 KB
Download MS761 Datasheet PDF
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Datasheet Summary

PRESSURE SENSOR DIE (0-1 BAR) - 0 to 100 kPa bar range (1 bar or 14.5 PSI) - High Sensitivity - ROHS-patible & Pb-free1 DESCRIPTION The sensor element of the MS761A consists of a silicon micro-machined membrane with a Pyrex glass mounted under vacuum. Implanted resistors make use of the piezo-resistive effect. The absolute pressure sensor (MS761-A) carries a sealed vacuum reference cavity underneath the membrane whereas the differential sensor (S-761-D) has a hole in the Pyrex glass at the backside of the sensor. Features - Unpensated pressure sensor die - High Sensitivity: Output Span 240 mV @ 5V - Temperature Range -40°C …+ 125°C - Linearity 0.15 % (typical) - Small Die...