MS3110 cmos equivalent, universal capacitive readout cmos.
* Capacitance resolution: 4.0aF/rtHz
* Sensor modes: single variable or dual differential variable
* On-chip dummy capacitor for quasi-differential operation.
Pressure Sensors Velocity Sensors Rate Sensors Touch Sensors Motion Sensors
Accelerometers (low g) Displacement Fluid .
The Universal Capacitive ReadoutTM IC (MS3110) is a general purpose, ultra-low noise CMOS IC intended to support a variety of MEMS sensors that require a high resolution capacitive readout interface. The MS3110 requires only a single +5VDC supply an.
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