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Motorola Electronic Components Datasheet

MPXT2010 Datasheet

Silicon Pressure Sensor

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MOTOROLA
SEMICONDUCTOR TECHNICAL DATA
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by MPXT2010/D
Silicon Pressure Sensor
On-Chip Temperature
Compensated and Calibrated
The MPXT2010 Series silicon piezoresistive pressure sensors provide a very accurate
and linear voltage output — directly proportional to the applied pressure. These sensors
house a single monolithic silicon die with the strain gauge and thin–film resistor network
integrated on each chip. The sensor is laser trimmed for precise span and offset, both
calibrated and temperature compensated.
Features
Stress Isolated Top Piston Fit Package
Gauge Pressure Measurement
Temperature Compensated over 0° to + 85°C
Unique Silicon Shear Stress Strain Gauge
Ratiometric to Supply Voltage
Available in Unibody Package (Case 344), See MPX2010 Series Data Sheet
Application Examples
Respiratory Diagnostic Devices and Systems
Air Movement Control (HVAC)
Level Indicators
Controllers
Pressure Switching
VS
3
X–ducer
SENSING
ELEMENT
THIN FILM
TEMPERATURE
COMPENSATION
AND
CALIBRATION
CIRCUITRY
2 Vout+
4 Vout–
1
GND
Figure 1. Calibrated and Temperature Compensated
Pressure Sensor Schematic
MPXT2010
SERIES
COMPENSATED
PRESSURE SENSOR
0 to 10 kPa (0 to 1.45 psi)
FULL SCALE SPAN: 25 mV
BASIC ELEMENT
CASE 473A–01
PIN NUMBER
1 Gnd 5 N/C
2 +Vout 6 N/C
3 VS 7 N/C
4 –Vout 8 N/C
NOTE: Pins 5, 6, 7, and 8 are not
device connections. Do not connect
to external circuitry or ground. Pin 1
is noted by the notch in the Lead.
Senseon and X–ducer are trademarks of Motorola, Inc.
REV 1
© MMotootroolrao, lIanc.S1e9n97sor Device Data
1


Motorola Electronic Components Datasheet

MPXT2010 Datasheet

Silicon Pressure Sensor

No Preview Available !

MPXT2010 SERIES
MAXIMUM RATINGS(1)
Parametrics
Overpressure(9) (P1 > P2)
Burst Pressure(9) (P1 > P2)
Symbol
Pmax
Pburst
Value
75
100
Storage Temperature
Tstg – 40 to +125
Operating Temperature
TA – 40 to +125
1. TC = 25°C unless otherwise noted.
2. Exposure beyond the specified limits may cause permanent damage or degradation to the device.
Unit
kPa
kPa
°C
°C
OPERATING CHARACTERISTICS (VS = 10 Vdc, TA = 25°C unless otherwise noted, P1 > P2)
Characteristic
Symbol
Min
Pressure Range(1)
Supply Voltage(2)
POP
VS
0
Supply Current
Offset(3)
Full Scale Span(4)
Io
Voff
VFSS
–1.0
24
Sensitivity
V/P —
Linearity(5)
— –1.0
Pressure Hysteresis(5) (0 to 10 kPa)
——
Temperature Hysteresis(5) (– 40°C to +125°C)
——
Temperature Effect on Offset(5)
Temperature Effect on Full Scale Span(5)
TCVoff
TCVFSS
–1.0
–1.0
Input Impedance
Zin 1300
Output Impedance
Response Time(6) (10% to 90%)
Warm–up Time(7)
Zout
tR
1400
Offset Stability(8)
——
Typ
10
6.0
25
2.5
± 0.1
± 0.5
1.0
20
±ā0.5
Max
10
16
+1.0
26
+1.0
+1.0
+1.0
2550
3000
Unit
kPa
Vdc
mAdc
mV
mV
mV/kPa
%VFSS
%VFSS
%VFSS
mV
%VFSS
ms
ms
%VFSS
MECHANICAL CHARACTERISTICS
Characteristic
Symbol
Min
Typ
Max Unit
Weight, Basic Element
— — 2.0 — Grams
NOTES:
1. 1.0 kPa (kiloPascal) equals 0.145 psi.
2. Device is ratiometric within this specified excitation range. Operating the device above the specified excitation range may induce additional
error due to device self–heating.
3. Offset (Voff) is defined as the output voltage at the minimum rated pressure.
4. Full Scale Span (VFSS) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the
minimum rated pressure.
5. Accuracy (error budget) consists of the following:
Linearity:
Output deviation from a straight line relationship with pressure over the specified pressure range.
Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is
cycled to and from the minimum or maximum operating temperature points, with zero differential pressure
applied.
Pressure Hysteresis: Output deviation at any pressure within the specified range, when this pressure is cycled to and from the
minimum or maximum rated pressure, at 25°C.
TcSpan:
Output deviation over the temperature range of 0 to 85°C, relative to 25°C.
TcOffset:
Output deviation with minimum rated pressure applied, over the temperature range of 0 to 85°C, relative to
25°C.
Variation from Nominal: The variation from nominal values, for Offset or Full Scale Span, as a percent of VFSS, at 25°C.
6. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to
a specified step change in pressure.
7. Warm–up is defined as the time required for the product to meet the specified output voltage after the Pressure has been stabilized.
8. Offset stability is the product’s output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test.
9. Exposure beyond these limits may cause permanent damage or degradation to the device.
2 Motorola Sensor Device Data


Part Number MPXT2010
Description Silicon Pressure Sensor
Maker Motorola
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