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D6F-03A3-000 Datasheet Preview

D6F-03A3-000 Datasheet

MEMS Mass Flow Sensor

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MEMS Mass Flow Sensor
D6F-03A3-000
Compact, sensors featuring MEMS
technology for precision mass airflow
measurement
• Precision unidirectional mass airflow up to 3 LPM
• Stable output across full scale
• Ultra-compact size 36.6 (L) x 8 (W) x 16.8 (H) mm
• Low power consumption
Application Examples
• Pick and place systems
• Industrial processes
• Leak detection
• Spectroscopy
• Mass flow controllers
• Scientific / test equipment
• Environmental comfort controls
• Fuel cell controls
Ordering Information
Model
D6F-03A3-000
D6F-Cable2
Case
Thermoplastic resin / Aluminum alloy
*Dry gas must not contain large particles, e.g., dust, oil, mist.
Rating
Absolute maximum rating
Item
Power-supply voltage
Output voltage
VCC
VOUT
Term
Applicable Gas
Air*
Flow Range
0 – 3 LPM
Ratings
26.4
6
VDC
VDC
Unit
MEMS Mass Flow Sensor D6F-03A3-000
1




Omron

D6F-03A3-000 Datasheet Preview

D6F-03A3-000 Datasheet

MEMS Mass Flow Sensor

No Preview Available !

Electrical Performance
Recommended operation condition and DC characteristic
Item
Power-supply voltage
Operating temperature
Maximum output voltage
Minimum output voltage
VCC
TOPR
VOH
VOL
Term
Condition
Load resistance 10k
Load resistance 10k
MIN
10.8
0
5
0
TYP
MAX
26.4
50
5.7
1
Unit
VDC
°C
VDC
VDC
Basic Performance
0 to 3L/min. (Normal) volumetric flow rate at 0° C, 101.3kPa.
Measurement condition: Power-supply voltage 12 ±0.1VDC, ambient temperature 25 ±5° C and ambient air humidity 25 to 75% RH.
D6F-03A3-000
Flow Rate L/min (normal)
Output Voltage (VDC)
0
1.00 ±0.2
0.6
2.83 ±0.2
1.2
3.77 ±0.2
1.8
4.34 ±0.2
2.4
4.72 ±0.2
3.0
5.00 ±0.2
Characteristics
Degree of Protection
Applicable Gas
Electrical Connection
Output Signal
Current Consumption
Repeat Accuracy
Insulation Resistance
Dielectric Strength
Withstand Pressure
Operating Temperature
Operating Humidity
Storage Temperature
Storage Humidity
Weight
IP40
Air
Connector (3 wire)
Analog, 1-5VDC (load resistance 10kmin)
Max 15mA (no load, VCC = 12 to 24VDC, VSS = GND = 0V, 25° C)
±5% FSD max, 25° C
20Mohm min. (500VDC between lead terminals and case)
500VAC, 50/60Hz for 1 minute (leakage current typ. <1mA) between lead terminals and case
200 kPa
0 to 50° C (with no ice or dew condensation)
85%RH max. (with no ice or dew condensation)
-10 to 60° C (with no ice or dew condensation)
85%RH max. (with no ice or dew condensation)
5.27g
Precautions
1. Avoid use in excessively dirty, wet environments
2. Do not use in the presence of flammable gases (e.g. hydrogen,
methane, ethane) and liquefied petroleum gas. In addition, do not
use with corrosive gases (e.g. chlorine, sulphur, acids, alkalis,
etc.).
3. Install in the direction of the arrow indicated.
4. For best results (optimum accuracy), mount horizontally.
5. Use four suitable M3 screws for mounting. Do not exceed a fixing
torque of 0.59 Nm.
6. Do not modify D6F- in any way.
7. Do not place any object in or close to the inlet and outlet orifices.
8. Do not use the sensor in any of the following environments:
a location that receives radiant heat from the sun or apparatus
a place where intense light may radiate down
where fast changing temperatures occur
locations prone to freezing, high humidity, condensation
places where large magnitudes of vibration or shock could occur
9. Noise countermeasures: VERY IMPORTANT: Take suitable pre-
cautions to minimize the effects and potential for induced electri-
cal noise. Install away from apparatus that generates strong high
frequencies, surges and spikes. Take particular care to install
away from AC power transformers, live mains power lines and
high power magnetic circuits. Attach a surge suppressor and a
noise filter to the peripheral equipment.
10.Ensure good grounding is achieved by grounding the GND termi-
nal to the peripheral equipment’s main ground frame connection
and its associated regulated power supply.
11.Do not make a direct solder connection to the integral terminals. It
is recommended you use the optional cable ‘D6F-CABLE2’ for
attachment and to ensure correct connection.
12.D6F- is a precision component. Keep in original packaging and
remove only when ready for installation. Damage may occur if
subjected to excessive force (e.g. dropped or kicked). Any item
suspected to be damaged should be discarded.
13.Immediately following installation, a qualified person should per-
form checks to ensure safe, satisfactory operation.
2 MEMS Mass Flow Sensor D6F-03A3-000


Part Number D6F-03A3-000
Description MEMS Mass Flow Sensor
Maker Omron
Total Page 5 Pages
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