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SENSORTECHNICS

AWM90000 Datasheet Preview

AWM90000 Datasheet

Mass flow sensor

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AWM90000 Series
Mass flow sensor for gases
FEATURES
· Ranges 0...±200 sccm1
or 0...±2 "H2O (0...±5 mbar)
· Bidirectional sensing
· Actual mass flow sensing
· Low differential pressure sensing
SERVICE
To be used with dry gases only
The AWM series is NOT designed for liquid
flow and will be damaged by liquid flow through
the sensor
SPECIFICATIONS
Maximum ratings
Supply voltage2
Power consumption
Temperature limits
Operating
Storage
Mechanical shock
ELECTRICAL CONNECTION
8 to 15 V
typ. 10 ±0.01 V
50 mW
-25 to 85°C
-40 to 90°C
100 g (5 drops, 6 axes)
Note:
1 sccm denotes standard cubic centimeters per minute
2 Output voltage is ratiometric to supply voltage
12345678
December 2007 / 592
1/6
www.sensortechnics.com




SENSORTECHNICS

AWM90000 Datasheet Preview

AWM90000 Datasheet

Mass flow sensor

No Preview Available !

AWM90000 Series
Mass flow sensor for gases
FLOW SENSOR CHARACTERISTICS3
VS = 10 ±0.01 V, TA = 25°C
Part no.
Flow range
(full scale)
Pressure
range
AWM92100V
AWM92200V
±200 sccm
±2 "H2O
Max. flow change4
5.0 l/sec
5.0 l/sec
Output voltage
@ trim point
77 mV @ 200 sccm
38 mV @ 2 "H2O
PERFORMANCE CHARACTERISTICS
VS = 10 ±0.01 V, TA = 25°C
Characteristics
Zero offset
Repeatability and hysteresis (combined)
Ratiometricity error2
Temperature effects5
Offset
Span
-25 to 85 °C6
-25 to 25 °C
25 to 85 °C
Sensor resistance (pin 1 - pin 2, pin 1 - pin 8)
Sensor current
Response time
Common mode pressure
AWM92100V
AWM92200V
AWM92100V
AWM92200V
AWM92100V
AWM92200V
Min.
-15
1.5
Typ.
0
±0.1
±0.30
±2.07
-3.08
255
±1.08
-305
1.75
1.0
Max.
15
±0.35
Unit
mV
%FSO
% reading
mV
%FSO
% reading
%FSO
% reading
2.2 kOhm
0.6 mA
3.0 ms
25 psi
Notes:
2 Output voltage is ratiometric to supply voltage
3 A 5 micron filter is recommended for all devices.
4 Maximum allowable rate of flow change to prevent damage.
5 Temperature shifts in differential pressure devices are mostly due to the density change of the gas over temperature.
6 Shift is relative to 25 °C.
7 Assumes low TCR bridge resistance used (pins 2 and 8).
8 Requires recommended Rc value of 1K Ohm is used (pins 3 to 7) and typ. heater control circuit. Maximum current Rh.
2/6 December 2007 / 592
www.sensortechnics.com


Part Number AWM90000
Description Mass flow sensor
Maker SENSORTECHNICS
Total Page 6 Pages
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