AWM90000
FEATURES
- Ranges 0...±200 sccm1 or 0...±2 "H2O (0...±5 mbar)
- Bidirectional sensing
- Actual mass flow sensing
- Low differential pressure sensing
SERVICE
To be used with dry gases only
The AWM series is NOT designed for liquid flow and will be damaged by liquid flow through the sensor
SPECIFICATIONS
Maximum ratings Supply voltage2
Power consumption Temperature limits
Operating Storage Mechanical shock
ELECTRICAL CONNECTION
8 to 15 V typ. 10 ±0.01 V
50 m W
-25 to 85°C -40 to 90°C 100 g (5 drops, 6 axes)
Note: 1 sccm denotes standard cubic centimeters per minute 2 Output voltage is ratiometric to supply voltage
December 2007 / 592
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.sensortechnics.
AWM90000 Series
Mass flow sensor for gases
FLOW SENSOR CHARACTERISTICS3
VS = 10 ±0.01 V, TA = 25°C
Part no.
Flow range (full scale)
Pressure range
AWM92100V AWM92200V
±200 sccm
±2 "H2O
Max. flow change4
5.0 l/sec 5.0 l/sec
Output voltage @ trim point
77 m V @ 200 sccm 38 m V @ 2 "H2O
PERFORMANCE CHARACTERISTICS...
