Datasheet Summary
AWM90000 Series
Mass flow sensor for gases
Features
- Ranges 0...±200 sccm1 or 0...±2 "H2O (0...±5 mbar)
- Bidirectional sensing
- Actual mass flow sensing
- Low differential pressure sensing
SERVICE
To be used with dry gases only
The AWM series is NOT designed for liquid flow and will be damaged by liquid flow through the sensor
SPECIFICATIONS
Maximum ratings Supply voltage2
Power consumption Temperature limits
Operating Storage Mechanical shock
ELECTRICAL CONNECTION
8 to 15 V typ. 10 ±0.01 V
50 mW
-25 to 85°C -40 to 90°C 100 g (5 drops, 6 axes)
Note: 1 sccm denotes standard cubic centimeters per minute 2 Output voltage is ratiometric to supply voltage
December 2007 /...