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Silicon Microstructures

SM4321 Datasheet Preview

SM4321 Datasheet

Gauge & Differential Pressure Sensor

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Medium Pressure
Digital Sensor
SM4221, SM4321, SM4421 Series
Gauge & Differential Pressure Sensors
FEATURES
Pressure ranges from 2.5 t0 14.9 PSI gauge, differential and
asymmetric outputs
14-bit digital, pressure calibrated and temperature compensated
output
I2C Digital Interface
Compensated temperature range: -20 to 85oC
Insensitive to mounting orientation
Robust JEDEC SOIC-16 package for automated assembly
Manufactured according to ISO9001 and ISO/TS 16949 standards
DESCRIPTION
The SM4X21 Series is a digital, medium pressure MEMS sensor
family offering state-of-the-art pressure transducer technology and
CMOS mixed signal processing technology to produce a digital, fully
conditioned, multi-order pressure and temperature compensated
sensor in JEDEC standard SOIC-16 package with a dual vertical
porting option. It is available in both compound gage or differential
pressure configurations. With the dual porting, a vacuum-gage
measurement is possible to minimize altitude errors due to changes
in ambient pressure.
Combining the pressure sensor with a signal-conditioning ASIC in a
single package simplifies the use of advanced silicon micro-machined
pressure sensors. The pressure sensor can be mounted directly on a
standard printed circuit board and a high level, calibrated pressure
signal can be acquired from the digital interface. This eliminates the
need for additional circuitry, such as a compensation network or
microcontroller containing a custom correction algorithm.
Customer-specified pressure ranges and supply voltages are
available.
The SM4X21 Series is shipped in sticks or tape & reel.
Medical
Sleep Apnea
CPAP
Ventilators
Gas Flow Instrumentation
Air Flow Monitors
Negative Pressure Wound Therapy
Industrial
Airflow Measurement
Pneumatic Gauges
Pressure Switches
Safety Cabinets
Life Sciences
Gas Flow Instrumentation
Consumer
Sports Equipment
Appliances
Silicon Microstructures, Inc. 2001-2016. All rights reserved
DOC # 40DS4960.02
+1-(408) 577-0100 | sales@si-micro.com I www.si-micro.com
Page 1




Silicon Microstructures

SM4321 Datasheet Preview

SM4321 Datasheet

Gauge & Differential Pressure Sensor

No Preview Available !

SM4221, SM4321, SM4421 Series
www.si-micro.com
Absolute Maximum Ratings
All parameters are specified at Vdd = 3.3 V supply voltage at 25oC, unless otherwise noted.
No.
Characteristic
Symbol Minimum Typical Maximum
Units
1
Supply Voltage
VDD
2.7
2
Supply Current
IVDD
3
Update Period
6.00
V
4.00
mA
2
mS
4
Compensated Temperature
TCOMP
-20
+85
°C
5
Operating Temperature(a)
TOP
-40
+105
°C
6
Storage Temperature(a)
TSTG
-40
-
+125
°C
7
Media Compatibility(a,b)
Proof Pressure(a, c)
8
2.5 – 7.5 PSI
PProof
7.5 – 15 PSI
Burst Pressure(a, d)
9
2.5 – 7.5 PSI
PBurst
7.5 – 15 PSI
25
PSI
45
PSI
45
PSI
75
PSI
Notes:
a. Tested on a sample basis.
b. Clean, dry gas compatible with wetted materials. Wetted materials include silicon, epoxy, RTV, gold and aluminum.
c. Proof pressure is defined as the maximum pressure to which the device can be taken and still perform within specifications after
returning to the operating pressure range
d. Burst pressure is the pressure at which the device suffers catastrophic failure resulting in pressure loss through the device.
Silicon Microstructures, Inc. 2001-2016. All rights reserved
DOC # 40DS4960.02
+1-(408) 577-0100 | sales@si-micro.com I www.si-micro.com
Page 2



Part Number SM4321
Description Gauge & Differential Pressure Sensor
Maker Silicon Microstructures
Total Page 3 Pages
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