FM361 Datasheet - ETC

FM361 Mass Flow Controllers and Flowmeters

Tylan FC260/FM360 Mass Flow Controllers and Flowmeters Low cost mass flow controllers with long-term repeatability and performance ® Process Values Designed to meet the exacting requirements of semiconductor processes and equipment, the Tylan FC260 and Tylan FM360 models are premium quality elastomer-sealed mass flow controllers and meter. These MFCs combine proven components and techniques with innovative concepts in both mechanical and electrical design. Excellent Performance Tylan FC260 qn.

FM361 Features

* Attitude Insensitive Flow Sensor Product Benefits Eliminates air convection currents inside its case without sacrificing response speed. Can be mounted in any position without requiring zero adjustment. Superior Bypass Design to Operate under Laminar Flow Conditions Solid State Valve Assembly Cons

FM361_ETC.pdf