MS3110 Datasheet - MicroSensors

MS3110 Universal Capacitive Readout CMOS

The Universal Capacitive ReadoutTM IC (MS3110) is a general purpose, ultra-low noise CMOS IC intended to support a variety of MEMS sensors that require a high resolution capacitive readout interface. The MS3110 requires only a single +5VDC supply and some decoupling components. No additional compon.

MS3110 Features

* Capacitance resolution: 4.0aF/rtHz

* Sensor modes: single variable or dual differential variable

* On-chip dummy capacitor for quasi-differential operation and initial adjustment

* Gain and DC offset trim

* Programmable bandwidth adjustment 0.5 to 8kHz (9 s

MS3110-MicroSensors.pdf