MS3110 Datasheet - MicroSensors

MS3110, Universal Capacitive Readout CMOS

MS3110 Universal Capacitive ReadoutTM IC .
The Universal Capacitive ReadoutTM IC (MS3110) is a general purpose, ultra-low noise CMOS IC intended to support a variety of MEMS sensors that requi.

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Datasheet Details

Part number:

MS3110

Manufacturer:

MicroSensors

File Size:

891.40 KB

Description:

Universal Capacitive Readout CMOS

Features

* Capacitance resolution: 4.0aF/rtHz
* Sensor modes: single variable or dual differential variable
* On-chip dummy capacitor for quasi-differential operation and initial adjustment
* Gain and DC offset trim
* Programmable bandwidth adjustment 0.5 to 8kHz (9 s

Applications

* Pressure Sensors Velocity Sensors Rate Sensors Touch Sensors Motion Sensors Accelerometers (low g) Displacement Fluid Control Flow Sensors Gas Sensors Page 1 MicroSensors, Inc. , 3001 Redhill Avenue, Costa Mesa, CA 92626 This document contains preliminary information on a product under development

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