D6F-W MEMS Flow Sensor A Compact Sensor That Uses OMRON’s Unique Flow Path Structure for High-performance Flow Rate Measurement. Anti-dust performance enhanced by OMRON’s unique three-dimensional flow path structure. High accuracy of ± 5% FS. RoHS Compliant Refer to the Common Precautions for the D6F Series on page 40. Ordering Information MEMS Flow Sensor Applicable fluid Flow rate range 0 to 1 m/s Air 0 to 4 m/s 0 to 10 m/s Model D6F-W01A1 D6F-W04A1 D6F-W10A1 Acce.