XLS-16 Datasheet (SMC) - High Vacuum Angle Valve

XLS-16, High Vacuum Angle Valve

Aluminum High Vacuum Angle Valve Series XLA/XLAV Dimensions XLA/Air operated E (b) C D øFn (KF flange) (a) E Heater (Option) (c) Auto switch (Option) øFd (K flange) C B øG A (mm) Model A A 40 50 65 70 88 90 B 103 113 158 170 196 235 C 38 48 66 79 100 117 D 1 1 2 2 3 3 E Note 1) 12 11 11 11 11 Fn 30 40 55 75 87 114 Fd 95 110 H G 17 26 41 52 70 83 H 40 39 63 68 69 96 XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 Note 1) Dimensi