SM30D Datasheet (Silicon Microstructures)

SM30D, OEM Silicon Pressure Die

The SM30D is a silicon micro-machined, piezoresistive pressure sensing die.

This device is available with a full-scale range of 5 to 150 PSI.

A 500 PSI version is in development.

Both open-bridge and closed-bridge versions are available.

This sensor is ideal for OEM and high-volume applications Pro

SM30D Features

* Enhanced stability with an integrated field shield

* Qualified operating temperature range: -40oC to 150oC

* Small size 1.34 x 1.34 mm

* Differential or gauge configuration

* Available 5, 15, 30, 80, 150 & 500 PSI

* Ratiometric with supply voltage up