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DC SPUTTERING POWER SUPPLY WITH ACTIVE ARC SUPPRESSION
DESCRIPTION
In the 1990s, CPI Canada pioneered reliability using Resonant Power Conversion Technology for high power processing. This method offers unique advantages in sputtering systems in the areas of wide load range, reliability (using an inherently shortcircuit proof, rugged power chain), and wide control range (from < 1% to full power). With proven reliability, CPI has continued to evolve this technology into higher powers with 36 kW available in an 8.75” high chassis. When it comes to Watts/inch3 (size), Watts/lbs (weight), Watts/$ (price), and proven field reliability, CPI is unmatched in the industry.