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FM361 Datasheet

Mass Flow Controllers And Flowmeters

Manufacturer: Unknown Manufacturer

Datasheet Details

Part number FM361
Manufacturer Unknown Manufacturer
File Size 151.64 KB
Description Mass Flow Controllers and Flowmeters
Datasheet FM361_ETC.pdf

FM361 Overview

Tylan FC260/FM360 Mass Flow Controllers and Flowmeters Low cost mass flow controllers with long-term repeatability and performance ® Process Values Designed to meet the exacting requirements of semiconductor processes and equipment, the Tylan FC260 and Tylan FM360 models are premium quality elastomer-sealed mass flow controllers and meter. These MFCs bine proven ponents and techniques with innovative concepts in...

FM361 Key Features

  • Ordering Information
  • FC-261/FM-361
  • Ordering Information
  • 2%) FC262 50:2 (100%
  • 4%) Type 316

FM361 Distributor