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Freescale Semiconductor Data Sheet: Technical Data
Document Number: MPxx5004 Rev. 12.1, 05/2015
MPxx5004, 0 to 3.92 kPa, Differential
and Gauge, Integrated Pressure Sensor
Freescale’s MPxx5004 series piezoresistive transducer is a state-of-the-art monolithic silicon pressure sensor designed for a wide range of applications, but particularly those employing a microcontroller or microprocessor with A/D inputs. This sensor combines a highly sensitive implanted strain gauge with advanced micromachining techniques, thin-film metallization, and bipolar processing to provide an accurate, high level analog output signal that is proportional to the applied pressure.
Features • 1.5% maximum error for 0 to 100 mm H2O over +10 °C to +60 °C with
autozero
• 2.
MPVZ5004 Datasheet
