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Freescale Semiconductor Data Sheet: Technical Data
Pressure
MPX2053 Rev 9, 10/2012
50 kPa On-Chip Temperature Compensated and Calibrated Silicon Pressure Sensors
The MPX2053 series devices are silicon piezoresistive pressure sensors that provide a highly accurate and linear voltage output directly proportional to the applied pressure. A single, monolithic silicon diaphragm with the strain gauge and an integrated thin-film resistor network. Precise span and offset calibration with temperature compensation are achieved by laser trimming.