Overview: .. SEMICONDUCTOR TECHNICAL DATA MOTOROLA Freescale Semiconductor, Inc. Order this document by MPXAZ4115A/D ARCHIVED BY FREESCALE SEMICONDUCTOR, INC. 2005 Media Resistant, Integrated Silicon MPXAZ4115A Pressure Sensor for Manifold SERIES Absolute Pressure, Altimeter or Barometer Applications On-Chip Signal Conditioned, INTEGRATED PRESSURE SENSOR Temperature pensated, and 15 to 115 kPa (2.2 to 16.7 psi) 0.2 to 4.8 V Output Calibrated Freescale Semiconductor, Inc... ARCHIVED BY FREESCALE SEMICONDUCTOR, INC. 2005 Motorola’s MPXAZ4115A series sensor integrates on–chip, bipolar op amp circuitry and thin film resistor networks to provide a high output signal and temperature pensation. The small form factor and high reliability of on–chip integration make the Motorola pressure sensor a logical and economical choice for the system designer. The MPXAZ4115A series piezoresistive transducer is a state–of–the–art, monolithic, signal conditioned, silicon pressure sensor. This sensor bines advanced micromachining techniques, thin film metallization, and bipolar semiconductor processing to provide an accurate, high level analog output signal that is proportional to applied pressure. Figure 1 shows a block diagram of the internal circuitry integrated on a pressure sensor chip.