HPTA0100
DESCRIPTION
HPTA0100 is a kind of high temperature MEMS sensor based on SOI semiconductor materiel . Its operating temperature is -30~180°C. With advanced beam--diaphragm structure design and stress equipartition technology adopted, HPTA0100 sensor has the advantages of high temperature resistance, transient high temperature shock immunity, high measuring range and high overload which make it ideal for pressure self-control testing equipments used in aerospace / aviation, energy transportation, oil exploitation, heat process automation in Chemical industry, metallurgical automation, etc. HPT series sensors have been widely used for measuring diesel spray pressure in the self-control testing ponents of diesel engines in vehicles and vessels. HPT sensors still can operate normally even though the environment temperature exceeds 180 ℃. HPT sensors are produced first by ion implanting the four piezoresistors into silicon. The four resistors are connected in a Wheatstone bridge...
