HPTA0200 Overview
HPTA0200 is a kind of high temperature MEMS sensor based on SOI semiconductor materiel . Its operating temperature is -30~180°C. With advanced beam--diaphragm structure design and stress equipartition technology adopted, HPTA0200 sensor has the advantages of high temperature resistance, transient high temperature shock immunity, high measuring range and high overload which make it ideal for pressure self-control...