HPTA1000 Description
HPTA1000 is a kind of high temperature MEMS sensor based on SOI semiconductor materiel . Its operating temperature is -30~180°C. With advanced beam--diaphragm structure design and stress equipartition technology adopted, HPTA1000 sensor has the advantages of high temperature resistance, transient high temperature shock immunity, high measuring range and high overload which make it ideal for pressure self-control...