F6589
FEATURES q Ultra Thin Type: 2.5 mm (Max.)
- Detection at closed distance from samples q Flexible Lead Out (polymide film)
- Easy system design with a flexible wiring
- Low outguessing for high vacuum operation q Light Weight
APPLICATIONS q SEM q FIB System q Mask Aligner q Electron Beam Measuring System
TMCPF0083
SPECIFICATIONS
Parameter Value Unit
GENERAL
Assembly Outer Diameter Effective Diameter Maximum Height MCP Channel Diameter MCP Stage Number Centerpipe Inner Diameter Dead Area around Center Hole Electrical Potential MCP-in Anode 28.0 11.0 2.5 12 2 1 4 -0.4 to +0.4 +2.4 (Max.) mm mm mm µm stage mm mm k V
MAXIMUM RATINGS
MCP Supply Voltage (In-Out) MCP Out-Anode Voltage Anode-Substrate Voltage Operating Vacuum Condition Ambient Temperature Baking Temperature Baking Time Vacuum Condition for Baking
- Not allowed to be baked. 2.0 0.4 2.4 Less than 6.7 × 10 -4 (5 × 10 -6) -50 to +70 200 8 Less than 6.7 × 10 -4 (5 × 10 -6) k V k V k V Pa (Torr) °C °C hours Pa (Torr)
CHARACTERISTICS...
