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MEMS Rotational Rate Sensors
GG1178 - Digital or Analog Output
Honeywell’s GG1178 family of rotation sensors are highperformance silicon micromachined angular rate sensors for multiple applications. They provide a low noise output signal with excellent performance over a large temperature range and in high vibration environments. Advanced Information
A GG1178 rate sensor utilizes a MEMS, Micro Electro Mechanical System, sense element and a CMOS ASIC in a ceramic 14-pin LCC package. The sensing element is fabricated from bulk silicon using proprietary deep reactive ion etching (DRIE) processes. It makes use of the physical properties of the Coriolis Effect and a capacitive sensing mechanism.
GG1178 Datasheet
