3022 Datasheet | ICS

DESCRIPTION The Model 3022 is a piezoresistive silicon accelerometer. The package is a ceramic substrate with a sealed ceramic cover. The ceramic provides an excellent bonding surface for the customers application specific adhesive. Each accelerometer includes a detailed calibration sheet, which provides test data and resistor pensation values for each sensor. The accelerometer consists of a micro machined silicon mass suspended by multiple beams from a silicon frame. Piezoresistors located in the beams change their resistance as the motion of the suspended mass changes the strain in the beams. Silicon caps on the top and bottom of the device are added to provide over-range stops. This design provides for a very low profile, high shock resistance, durability and built-in damping over a wide usable bandwidth. Each sensor is individually serialized. For an accelerometer with a mounting bracket designed to bolt the sensor to a mounting location, see the Model 3028. Please refer to the Models 3052 and 3058 for accelerometers with integral temperature pensation. Accelerometers FEATURES - Designed for Adhesive Mounting - ±0.5% Non-linearity (typical) - ±1.0% Temperature Performance (with p resistors-typical) - DC Response - Built-in Damping - Built-in Over-range Stops - Low Power - Pins or No Pins STANDARD RANGES Range ±2 ±5 ±10 ±20 g Range ±50 ±100 ±200 ±500 g - - - - - - - - I n t e r n e t : w w w. m s i u s a . c o m Te l : 1 - 7 5 7 - 7 6 6 - 1 5 0 0 N o r t h A m e r i c a To l l F r e e : 1 - 8 0 0 - 7 4 5 - 8 0 0 8 Fax: 1-757-766-4297 2-10 Accelerometer Selection Guide- Unamplified PC Board Mountable Accelerometer CALIBRATION DATA Model 3022 Figure 1. Calibration Data Sheet A calibration data sheet similar to the sample shown above is included with each unit. The calibration sheet provides the measured test and calibration data for the sensor. In addition to the test data, the values of calibration and temperature pensation resistors are also...