FS1027 Datasheet | IDT

Liquid Flow Sensor Module Description The FS1027 MEMS Liquid Flow Sensor Module measures the flow rate using the thermo-transfer (calorimetric) principle. The FS1027 is designed to measure liquids. The FS1027 offers key advantages over resistor-based flow solutions. The sensor utilizes thermopile sensing, which provides an excellent signal-to-noise ratio. The sensor prises a “solid” thermal isolation technology and silicon-carbide coating, which protects it from abrasive wear and provides robustness and longterm reliability. In parison, other sensors typically contain a fragile membrane above an etched cavity for the thermal isolation base. There are no moving...