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MS761 - PRESSURE SENSOR DIE

Description

The sensor element of the MS761A consists of a silicon micro-machined membrane with a Pyrex glass mounted under vacuum.

Implanted resistors make use of the piezo-resistive effect.

Features

  • Uncompensated pressure sensor die.
  • High Sensitivity: Output Span 240 mV @ 5V.
  • Temperature Range -40°C …+ 125°C.
  • Linearity 0.15 % (typical).
  • Small Die Size 2.00 X 1.86 mm.
  • Low cost, High reliability.

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Datasheet preview – MS761

Datasheet Details

Part number MS761
Manufacturer Intersema
File Size 240.19 KB
Description PRESSURE SENSOR DIE
Datasheet download datasheet MS761 Datasheet
Additional preview pages of the MS761 datasheet.

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Full PDF Text Transcription

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MS761 PRESSURE SENSOR DIE (0-1 BAR) • 0 to 100 kPa bar range (1 bar or 14.5 PSI) • High Sensitivity • ROHS-Compatible & Pb-free1 DESCRIPTION The sensor element of the MS761A consists of a silicon micro-machined membrane with a Pyrex glass mounted under vacuum. Implanted resistors make use of the piezo-resistive effect. The absolute pressure sensor (MS761-A) carries a sealed vacuum reference cavity underneath the membrane whereas the differential sensor (S-761-D) has a hole in the Pyrex glass at the backside of the sensor. FEATURES • Uncompensated pressure sensor die • High Sensitivity: Output Span 240 mV @ 5V • Temperature Range -40°C …+ 125°C • Linearity 0.15 % (typical) • Small Die Size 2.00 X 1.
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