MS761 Description
The sensor element of the MS761A consists of a silicon micro-machined membrane with a Pyrex glass mounted under vacuum. Implanted resistors make use of the piezo-resistive effect. The absolute pressure sensor (MS761-A) carries a sealed vacuum reference cavity underneath the membrane whereas the differential sensor (S-761-D) has a hole in the Pyrex glass at the backside of the sensor.
MS761 Key Features
- Unpensated pressure sensor die
- High Sensitivity: Output Span 240 mV @ 5V
- Temperature Range -40°C …+ 125°C
- Linearity 0.15 % (typical)
- Small Die Size 2.00 X 1.86 mm
- Low cost, High reliability
- For high resolution absolute sensor systems
- Engine Controls
- Barometers, Altimeters, Variometers