Intersema MS79005
the MS79005 consists of a silicon micro-machined membrane. This sensor, which has outstanding linearity and span values, is available in various configurations. The absolute pressure sensor employs a sealed vacuum reference cavity underneath the membrane.| Part No. | MS79005 |
|---|---|
| Datasheet | MS79005 Download |
| Manufacturer | Intersema |
| Description | PRESSURE SENSOR DIE |
| Buy | Stock & Price |
DESCRIPTION
The sensor element of Implanted resistors make use of the piezo-resistive effect to sense the membrane deflection and transform it in an electrical signal. The Pyrex glass wafer used for this sealing has a thickness of 0.2 mm (MS79005-A_0.2) or 0.5 mm (MS79005-A_0.5). Two gauge versions available: one with a drilled Pyrex glass (MS79005-D) and the other without Pyrex glass (MS79005-S).FEATURES
● Uncompensated pressure sensor die● Output Span 150mV @ 5V
● Temperature Range -40°…+125°C
● Linearity 0.05% (typical)
● Very small Die Size 1.78 x 1.78mm (MS79005-A)
● Low Cost, High reliability APPLICATION
● For absolute or differential pressure sensor systems
● Variometers ELECTRICAL CONNECTIONS Positive output for pressure applied topside Vs+ / EPI Out+ Out- R5+ R6+ GND1 GND2 R5- R6- R5 and R6 are placed on bulk Vs+ : Supply voltage of Wheatstone bridge Epi : Connection of epitaxial layer (membrane) Out- : Negative output Out+ : Positive output GND1 : Ground GND2 : Ground R5+ :...
