MS79005 - PRESSURE SENSOR DIE

General Description

The sensor element of the MS79005 consists of a silicon micro-machined membrane.

Implanted resistors make use of the piezo-resistive effect to sense the membrane deflection and transform it in an electrical signal.

Key Features

Uncompensated pressure sensor die.
Output Span 150mV @ 5V.
Temperature Range -40°…+125°C.
Linearity 0.05% (typical).
Very small Die Size 1.78 x 1.78mm (MS79005-A).
Low Cost, High reliability.

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MS79005 pressure sensor die by Intersema - Datasheet Preview

Datasheet Details

Part number	MS79005
Manufacturer	Intersema
File Size	231.20 KB
Description	PRESSURE SENSOR DIE
Datasheet	MS79005 Datasheet

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Other Datasheets by Intersema

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MS7901	PRESSURE SENSOR DIE
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Full PDF Text Transcription (Reference)

The following content is an automatically extracted verbatim text from the original manufacturer datasheet and is provided for reference purposes only.

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MS79005 PRESSURE SENSOR DIE (0-0.5 BAR) • 0 to 50 kPa range (500 mbar or 7.5 PSI) • Absolute/differential pressure sensors • RoHS-compatible & Pb-free1 DESCRIPTION The sensor element of the MS79005 consists of a silicon micro-machined membrane. Implanted resistors make use of the piezo-resistive effect to sense the membrane deflection and transform it in an electrical signal. This sensor, which has outstanding linearity and span values, is available in various configurations. The absolute pressure sensor employs a sealed vacuum reference cavity underneath the membrane. The Pyrex glass wafer used for this sealing has a thickness of 0.2 mm (MS79005-A_0.2) or 0.5 mm (MS79005-A_0.5).