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MS7912 Datasheet PDF

Intersema MS7912

the MS7912 consists of a small silicon micro-machined membrane with a Pyrex glass mounted under vacuum. The absolute pressure sensor (MS7912A) carries a sealed vacuum reference cavity underneath the membrane whereas the differential sensor (MS7912D) has a hole in the Pyrex glass at the backside of the sensor. DA7912_003.doc 00007912636 ECN 743 May 05th, 2005 3/4 PICKING TOOLS The MS7912 sensors have a sensitive membrane (0.5 x 0.5 mm) the top surface of the sensor dice has an outer of diameter is: 1.62 x 1.48 mm.
Part No. MS7912
Datasheet MS7912 Download
Manufacturer Intersema
Description PRESSURE SENSOR DIE
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MS7912 datasheet page 1 preview

DESCRIPTION

The sensor element of Implanted resistors make use of the piezo-resistive effect.

FEATURES

● Uncompensated pressure sensor die
● Output Span 150mV @ 5V
● Temperature Range -40°…+125°C
● Linearity 0.05% (typical)
● Small Die Size 1.72 x 1.58mm
● Low Cost, High reliability APPLICATION
● For absolute or differential pressure sensor systems
● Engine controls
● Dive computers ELECTRICAL CONNECTIONS Positive output for pressure applied topside Vs+ EPI Out+ Out- GND1 GND2 Vs+ : Supply voltage of Wheatstone bridge Epi : Connection of epitaxial layer (membrane) Out- : Negative output Out+ : Positive output GND1 : Ground GND2 : Ground 1 The European RoHS directive 2002/95/EC (Restriction of the use of certain Hazardous Substances in electrical and electronic equipment) bans the use of lead, mercury, cadmium, hexavalent chromium and polybrominated biphenyls (PBB) or polybrominated diphenyl ethers (PBDE). DA7912_003.doc 00007912636 ECN 743 May 05th, 2005 1/4 PAD OUT Vs+ Epi Out- MS7912...
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