Intersema MS7970
the MS7970 consists of a silicon micro-machined membrane. This sensor, which has outstanding linearity and span values, is available in various configurations. The absolute pressure sensor employs a sealed vacuum reference cavity underneath the membrane.| Part No. | MS7970 |
|---|---|
| Datasheet | MS7970 Download |
| Manufacturer | Intersema |
| Description | PRESSURE SENSOR DIE |
| Buy | Stock & Price |
DESCRIPTION
The sensor element of Implanted resistors make use of the piezo-resistive effect to sense the membrane deflection and transform it in an electrical signal. The Pyrex glass wafer used for this sealing has a thickness of 0.2 mm (MS7970-A_0.2) or 0.5 mm (MS7970-A_0.5). There are two gauge versions available: one with a drilled Pyrex glass (MS7970-D) and the other without Pyrex glass (MS7970-S).FEATURES
● Uncompensated pressure sensor die● Output span 310mV @ 5V
● Temperature range -40°…+125°C
● Linearity 0.25% (typical)
● Very small die size 1.72 x 1.58 mm (MS7970-A)
● Low cost, high reliability APPLICATION
● Absolute pressure sensor systems
● Differential/gauge pressure sensor systems
● Engine controls
● Dive computers ELECTRICAL CONNECTIONS Positive output for pressure applied topside Vs+ EPI Out+ Out- Vs+ : Supply voltage of Wheatstone bridge Epi : Connection of epitaxial layer (membrane) Out- : Negative output Out+ : Positive output GND1 : Ground GND2 : Ground GND1 GND2...
