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KXCNL-1010 - Tri-axis Digital Accelerometer

Description

The KXCNL-1010 is a tri-axis +/-2g, +/-4g, +/-6g, or +/-8g silicon micromachined accelerometer with integrated programmable state machines.

The sense element is fabricated using Kionix’s proprietary plasma micromachining process technology.

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Datasheet Details

Part number KXCNL-1010
Manufacturer Kionix
File Size 1.12 MB
Description Tri-axis Digital Accelerometer
Datasheet download datasheet KXCNL-1010 Datasheet
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± 2g / 4g / 6g / 8g Tri-axis Digital Accelerometer Specifications PART NUMBER: KXCNL-1010 Rev 3.0 Product Description The KXCNL-1010 is a tri-axis +/-2g, +/-4g, +/-6g, or +/-8g silicon micromachined accelerometer with integrated programmable state machines. The sense element is fabricated using Kionix’s proprietary plasma micromachining process technology. Acceleration sensing is based on the principle of a differential capacitance arising from acceleration-induced motion of the sense element, which further utilizes common mode cancellation to decrease errors from process variation, temperature, and environmental stress. The sense element is hermetically sealed at the wafer level by bonding a second silicon lid wafer to the device using a glass frit.
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