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KXD94-2802 - Tri-axis Accelerometer

Description

The KXD94-2802 is a Tri-axis, silicon micromachined accelerometer with a full-scale output range of +/-10g (98 m/s/s).

The sense element is fabricated using Kionix’s proprietary plasma micromachining process technology.

Features

  • an integrated 4-channel multiplexer (X, Y, Z, and Aux In). The Enable pin must be high for normal operation and low for power shutdown. There are 4 factory programmable modes of operation for the KXD94: Mode 00.
  • The three outputs (X, Y, Z) are read through the digital SPI interface, which is also used to command Selftest and Standby Mode. The digital I/O pads are powered from a separate power pin, and will interface to 1.8V logic. Mode 01.
  • The three outputs (X, Y, Z) are provid.

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Datasheet preview – KXD94-2802

Datasheet Details

Part number KXD94-2802
Manufacturer Kionix
File Size 351.49 KB
Description Tri-axis Accelerometer
Datasheet download datasheet KXD94-2802 Datasheet
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    ± 10g Tri-axis Accelerometer Specifications PART NUMBER: KXD94-2802 Rev. 2 May-2014 Product Description The KXD94-2802 is a Tri-axis, silicon micromachined accelerometer with a full-scale output range of +/-10g (98 m/s/s). The sense element is fabricated using Kionix’s proprietary plasma micromachining process technology. Acceleration sensing is based on the principle of a differential capacitance arising from acceleration-induced motion of the sense element, which further utilizes common mode cancellation to decrease errors from process variation, temperature, and environmental stress. The sense element is hermetically sealed at the wafer level by bonding a second silicon lid wafer to the device using a glass frit.
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