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KXPS5-3157 - Tri-axis Accelerometer

Description

The KXPS5-3157 is a Tri-axis, silicon micromachined accelerometer with a full-scale output range of +/-3g (29.4 m/s/s).

The sense element is fabricated using Kionix’s proprietary plasma micromachining process technology.

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Datasheet Details

Part number KXPS5-3157
Manufacturer Kionix
File Size 320.21 KB
Description Tri-axis Accelerometer
Datasheet download datasheet KXPS5-3157 Datasheet
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    ±3g Tri-axis Accelerometer Specifications PART NUMBER: KXPS5-3157 Rev. 3 Sep-2009 Product Description The KXPS5-3157 is a Tri-axis, silicon micromachined accelerometer with a full-scale output range of +/-3g (29.4 m/s/s). The sense element is fabricated using Kionix’s proprietary plasma micromachining process technology. Acceleration sensing is based on the principle of a differential capacitance arising from acceleration-induced motion of the sense element, which further utilizes common mode cancellation to decrease errors from process variation, temperature, and environmental stress. The sense element is hermetically sealed at the wafer level by bonding a second silicon lid wafer to the device using a glass frit.
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