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KXR94-2353 - Tri-axis Digital Accelerometer

Description

The KXR94-2353 is a Tri-axis, silicon micromachined accelerometer with a full-scale output range of +/-2g (19.6 m/s/s).

The sense element is fabricated using Kionix’s proprietary plasma micromachining process technology.

Features

  • an integrated 3-channel multiplexer (X, Y, Z). The Enable pin must be high for normal operation and low for power shutdown. Mode 10.
  • The three outputs (X, Y, Z) are provided on three analog output pins. The KXR94 also features an integrated 4-channel multiplexer (X, Y, Z, Aux In). The Enable pin must be high for normal operation and low for power shutdown. Mode 11.
  • The three outputs (X, Y, Z) are provided on three analog output pins. The KXR94 also features an integrated 4-chan.

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Datasheet Details

Part number KXR94-2353
Manufacturer Kionix
File Size 360.34 KB
Description Tri-axis Digital Accelerometer
Datasheet download datasheet KXR94-2353 Datasheet
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± 2g Tri-axis Digital Accelerometer Specifications PART NUMBER: KXR94-2353 Rev. 3 Nov-2010 Product Description The KXR94-2353 is a Tri-axis, silicon micromachined accelerometer with a full-scale output range of +/-2g (19.6 m/s/s). The sense element is fabricated using Kionix’s proprietary plasma micromachining process technology. Acceleration sensing is based on the principle of a differential capacitance arising from acceleration-induced motion of the sense element, which further utilizes common mode cancellation to decrease errors from process variation, temperature, and environmental stress. The sense element is hermetically sealed at the wafer level by bonding a second silicon lid wafer to the device using a glass frit.
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