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KXUD9-2050 - Tri-axis Digital Accelerometer

Description

The KXUD9 is a tri-axis silicon micromachined accelerometer with a user selectable full-scale output range of ±2g, ±4g, ±6g or ±8g.

The sense element is fabricated using Kionix‟s proprietary plasma micromachining process technology.

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Datasheet Details

Part number KXUD9-2050
Manufacturer Kionix
File Size 553.69 KB
Description Tri-axis Digital Accelerometer
Datasheet download datasheet KXUD9-2050 Datasheet
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    ± 2g / 4g / 6g / 8g Tri-axis Digital Accelerometer Specifications PART NUMBER: KXUD9-2050 Rev. 1 Sep-2010 Product Description The KXUD9 is a tri-axis silicon micromachined accelerometer with a user selectable full-scale output range of ±2g, ±4g, ±6g or ±8g. The sense element is fabricated using Kionix‟s proprietary plasma micromachining process technology. Acceleration sensing is based on the principle of a differential capacitance arising from accelerationinduced motion of the sense element, which further utilizes common mode cancellation to decrease errors from process variation, temperature, and environmental stress. The sense element is hermetically sealed at the wafer level by bonding a second silicon lid wafer to the device using a glass frit.
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