MS3110 Description
The Universal Capacitive ReadoutTM IC (MS3110) is a general purpose, ultra-low noise CMOS IC intended to support a variety of MEMS sensors that require a high resolution capacitive readout interface. The MS3110 requires only a single +5VDC supply and some decoupling ponents. No additional ponents are required.
MS3110 Key Features
- Capacitance resolution: 4.0aF/rtHz
- Sensor modes: single variable or dual differential variable
- On-chip dummy capacitor for quasi-differential operation and initial adjustment
- Gain and DC offset trim
- Programmable bandwidth adjustment 0.5 to 8kHz (9 steps)
- 2.25VDC output for ADC reference/ratiometric operation
- Single supply of +5.0VDC
- On-chip EEPROM for storage of settings
- Available in die or 16-pin SOIC