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MS3110 Universal Capacitive ReadoutTM IC
Description:
The Universal Capacitive ReadoutTM IC (MS3110) is a general purpose, ultra-low noise CMOS IC intended to support a variety of MEMS sensors that require a high resolution capacitive readout interface. The MS3110 requires only a single +5VDC supply and some decoupling components. No additional components are required.
MEMS sensors (such as accelerometers, rate sensors, and other sensors that can be modeled as variable capacitors) require a readout electronic interface that can sense small changes in capacitance. The MS3110 is capable of sensing capacitance changes down to 4.0 aF/rtHz, typical.
The MS3110 interfaces to either a differential capacitor pair or a single capacitive sensor.