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MS3110 - Universal Capacitive Readout CMOS

General Description

The Universal Capacitive ReadoutTM IC (MS3110) is a general purpose, ultra-low noise CMOS IC intended to support a variety of MEMS sensors that require a high resolution capacitive readout interface.

The MS3110 requires only a single +5VDC supply and some decoupling components.

Key Features

  • Capacitance resolution: 4.0aF/rtHz.
  • Sensor modes: single variable or dual differential variable.
  • On-chip dummy capacitor for quasi-differential operation and initial adjustment.
  • Gain and DC offset trim.
  • Programmable bandwidth adjustment 0.5 to 8kHz (9 steps).
  • 2.25VDC output for ADC reference/ratiometric operation.
  • Single supply of +5.0VDC.
  • On-chip EEPROM for storage of settings.
  • Available in die or 16-pin SOIC Ap.

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Datasheet Details

Part number MS3110
Manufacturer MicroSensors
File Size 891.40 KB
Description Universal Capacitive Readout CMOS
Datasheet download datasheet MS3110 Datasheet

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MS3110 Universal Capacitive ReadoutTM IC Description: The Universal Capacitive ReadoutTM IC (MS3110) is a general purpose, ultra-low noise CMOS IC intended to support a variety of MEMS sensors that require a high resolution capacitive readout interface. The MS3110 requires only a single +5VDC supply and some decoupling components. No additional components are required. MEMS sensors (such as accelerometers, rate sensors, and other sensors that can be modeled as variable capacitors) require a readout electronic interface that can sense small changes in capacitance. The MS3110 is capable of sensing capacitance changes down to 4.0 aF/rtHz, typical. The MS3110 interfaces to either a differential capacitor pair or a single capacitive sensor.