MS3110 Datasheet | MicroSensors

Description : The Universal Capacitive Readout TM IC (MS3110) is a general purpose, ultra-low noise CMOS IC intended to support a variety of MEMS sensors that require a high resolution capacitive readout interface. The MS3110 requires only a single +5VDC supply and some decoupling ponents. No additional ponents are required. MEMS sensors (such as accelerometers, rate sensors, and other sensors that can be modeled as variable capacitors) require a readout electronic interface that can sense small changes in capacitance. The MS3110 is capable of sensing capacitance changes down to 4.0 a F/rt Hz, typical. The MS3110 interfaces to either a differential capacitor pair or a single capacitive sensor. A high-level voltage output signal that is linear with full range of sense capacitance is provided. The MS3110 also includes an on-chip capacitive DAC (up to 10p F) for initial differential adjustments and/or for quasidifferential operation with a dummy capacitor. The MS3110 has provisions for trimming the gain and output offset. Bandwidth is also user programmable. An on-chip EEPROM is provided to store trim and program settings. Features : - Capacitance resolution: 4.0a F/rt Hz - Sensor modes: single variable or dual differential variable - On-chip dummy capacitor for quasi-differential operation and initial adjustment - Gain and DC offset trim - Programmable bandwidth adjustment 0.5 to 8k Hz (9 steps) - 2.25VDC output for ADC reference/ratiometric operation - Single supply of +5.0VDC - On-chip EEPROM for storage of settings - Available in die or 16-pin SOIC Applications: Pressure Sensors Velocity Sensors Rate Sensors Touch Sensors Motion Sensors Accelerometers (low g) Displacement Fluid Control Flow Sensors Gas Sensors Page 1 Micro Sensors, Inc., 3001 Redhill Avenue, Costa Mesa, CA 92626 This document contains preliminary information on a product under development. Micro Sensors, Inc. , .microsensors. reserves the right to change product specifications or discontinue this product...