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Dual-Axis Quasi-static MEMS Mirror Datasheet
A8L2.2-4200(AL/AU)
PRELIMINARY
PRELIMINARY
GENERAL OVERVIEW
Mirrorcle Technologies Gimbal-Less Dual-Axis Quasi-static MEMS Mirrors are based on proprietary design and fabrication technology. They provide fast optical beam steering across two axes, while requiring ultra-low power. The mirrors deflect laser beams or images to optical scanning angles of up to ±16° on each axis. Compared to large-scale galvanometer-based optical scanners, these devices require several orders of magnitude less driving power: continuous operation of the electro-static actuators that drive the mirror tip-tilt rotation dissipates less than 1mW of power.