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Freescale Semiconductor Technical Data
MPMZ2202 Rev 1, 09/2006
200 kPa On-Chip Temperature Compensated and Calibrated Silicon Pressure Sensors
The MPMZ2202 device is a silicon piezoresistive pressure sensor providing a highly accurate and linear voltage output directly proportional to the applied pressure. The sensor is a single, monolithic silicon diaphragm with the strain gauge and a thin-film resistor network integrated on-chip. The chip is laser trimmed for precise span and offset calibration and temperature compensation.