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Freescale Semiconductor Technical Data
MPVZ2202 Rev 0, 09/2006
200 kPa On-Chip Temperature Compensated & Calibrated Pressure Sensors
The MPVZ2202 device series is a silicon piezoresistive pressure sensor providing a highly accurate and linear voltage output - directly proportional to the applied pressure. The sensor is a single monolithic silicon diaphragm with the strain gauge and a thin-film resistor network integrated on-chip. The chip is laser trimmed for precise span and offset calibration and temperature compensation. They are designed for use in applications such as pump/motor controllers, robotics, level indicators, medical diagnostics, pressure switching and respiratory equipment.
MPVZ2202 Datasheet
