MMAS40G10D Datasheet | Motorola Semiconductor

MOTOROLA SEMICONDUCTOR TECHNICAL DATA Order this document by MMAS40G10D/D Micromachined Accelerometer ± 40g The MMAS40G family of silicon capacitive, micro- machined accelerometers Features integral signal amplification, signal conditioning, a 4- pole low- pass filter and temperature pensation. Zero- G offset, full scale span and filter roll- off are factory set and require no external passives. A calibrated self- test feature mechanically displaces the seismic mass with the application of a digital self- test signal. The MMAS40G incorporates a single polysilicon seismic mass, suspended between two fixed polysilicon plates (G- cell). The forces of acceleration move the seismic mass, thereby...