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MOTOROLA
SEMICONDUCTOR TECHNICAL DATA
Order this document by MMAS40G10D/D
Micromachined Accelerometer
± 40g
The MMAS40G family of silicon capacitive, micro–machined accelerometers features integral signal amplification, signal conditioning, a 4–pole low–pass filter and temperature compensation. Zero–G offset, full scale span and filter roll–off are factory set and require no external passives. A calibrated self–test feature mechanically displaces the seismic mass with the application of a digital self–test signal. The MMAS40G incorporates a single polysilicon seismic mass, suspended between two fixed polysilicon plates (G–cell). The forces of acceleration move the seismic mass, thereby resulting in a change in capacitance.
MMAS40G10D Datasheet
