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Freescale Semiconductor
+ 100 kPa On-Chip Temperature Compensated and Calibrated Silicon Pressure Sensors
The MPX2100 series devices silicon piezoresistive pressure sensors providing a highly accurate and linear voltage output directly proportional to the applied pressure. The sensor is a single, monolithic silicon diaphragm with the strain gauge and a thin-film resistor network integrated on-chip. The chip is laser trimmed for precise span and offset calibration an temperature compensation.
Features
• Temperature Compensated Over 0°C to +85°C • Available in Absolute, Differential and Gauge Configurations • Easy to Use Chip Carrier Package Options • Ratiometric to Supply Voltage • ±0.25% Linearity (MPX2100D Series)
Pressure
MPX2100 Rev 10, 10/2008
MPX2100 Series
0 to 100 kPa (0 to 14.