OQ8868
Key Features
- The DSICS realizes the following servo functions
- Focus servo loop
- Radial servo loop
- Built-in access procedure
- Sledge motor servo loop
- Single supply voltage (5 V)
- Flexible system oscillator
- Usable for single/double Foucault and astigmatic focus
- Wide range of adjustable servo characteristics possible
- Automatic focus start-up procedure and in-lock indication
