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MEMS Mass Flow Sensor
D6F-03A3-000
Compact, sensors featuring MEMS technology for precision mass airflow measurement
• Precision unidirectional mass airflow up to 3 LPM • Stable output across full scale • Ultra-compact size 36.6 (L) x 8 (W) x 16.8 (H) mm • Low power consumption
Application Examples
• Pick and place systems • Industrial processes • Leak detection • Spectroscopy • Mass flow controllers • Scientific / test equipment • Environmental comfort controls • Fuel cell controls
Ordering Information
Model D6F-03A3-000 D6F-Cable2
Case Thermoplastic resin / Aluminum alloy
*Dry gas must not contain large particles, e.g., dust, oil, mist.
■ Rating
Absolute maximum rating
Item Power-supply voltage Output voltage
VCC VOUT
Term
Applicable Gas Air*
Flow Range 0 – 3 LPM
Ratings 26.