MiCS-2614 Overview
MiCS-2614 Data Sheet 1087 rev 4 The MiCS-2614 is a pact MOS sensor. The MiCS-2614 is a robust MEMS sensor for ozone detection; suitable also for gas leak detection and outdoor air quality monitoring.
MiCS-2614 Key Features
- Smallest footprint for pact designs (5 x 7 x 1.55 mm)
- Robust MEMS sensor for harsh environments
- High-volume manufacturing for low-cost