XLDV-63 Datasheet PDF

Aluminum High Vacuum Angle Valve Series XLA/XLAV Dimensions XLA/Air operated E (b) C D øFn (KF flange) (a) E Heater (Option) (c) Auto switch (Option) øFd (K flange) C B øG A (mm) Model A A 40 50 65 70 88 90 B 103 113 158 170 196 235 C 38 48 66 79 100 117 D 1 1 2 2 3 3 E Note 1) — 12 11 11 11 11 Fn 30 40 55 75 87 114 Fd — — — — 95 110 H G 17 26 41 52 70 83 H 40 39 63 68 69 96 XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 Note 1) Dimension E applies when heater option is included. (Lead wire length: approx. 1 m) Note 2) (a), (b) and (c) in the above drawing indicate heater mounting positions. Moreover, heater mounting positions will differ depending on the type of heater. For further details, refer to mounting positions under “Replacement Heaters” on the back of page 9. XLAV/With solenoid valve J Port P (Pressure port) N M Port R (Exhaust port) P K L R (mm) Model (mm) Model J 35.5 40.5 50.5 K 13.4 14.9 22.7 L 8.5 8.5 8.5 M 2.7 2.7 2.7 N 3 3 3 J 57 78.5 87 K 25.7 28.7 38.7 L 8.5 12 12 M 2.7 4 4 N 3 2 2 XLAV-16 XLAV-25 XLAV-40 XLAV-50 XLAV-63 XLAV-80 ∗ Other dimensions are the same as the XLA. ∗ Other dimensions are the same as the XLA.