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Aluminum High Vacuum Angle Valve
Series XLA/XLAV
Dimensions
XLA/Air operated
E
(b)
C
D
øFn (KF flange)
(a)
E
Heater (Option) (c) Auto switch (Option)
øFd (K flange)
C
B
øG
A
(mm) Model
A
A
40 50 65 70 88 90
B
103 113 158 170 196 235
C
38 48 66 79 100 117
D
1 1 2 2 3 3
E Note 1)
— 12 11 11 11 11
Fn
30 40 55 75 87 114
Fd
— — — — 95 110
H G
17 26 41 52 70 83
H
40 39 63 68 69 96
XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80
Note 1) Dimension E applies when heater option is included. (Lead wire length: approx. 1 m) Note 2) (a), (b) and (c) in the above drawing indicate heater mounting positions. Moreover, heater mounting positions will differ depending on the type of heater. For further details, refer to mounting positions under “Replacement Heaters” on the back of page 9.
XLF-63 Datasheet
