XLF-63
XLF-63 is XLF/XLFV Series High Vacuum Angle Valve manufactured by SMC.
- Part of the XLF-16 comparator family.
- Part of the XLF-16 comparator family.
Aluminum High Vacuum Angle Valve
Series XLA/XLAV
Dimensions
XLA/Air operated
(b)
øFn (KF flange)
(a)
Heater (Option) (c) Auto switch (Option)
øFd (K flange)
øG
(mm) Model
40 50 65 70 88 90
103 113 158 170 196 235
38 48 66 79 100 117
1 1 2 2 3 3
E Note 1)
- 12 11 11 11 11
Fn
30 40 55 75 87 114
Fd
- -
- - 95 110
17 26 41 52 70 83
40 39 63 68 69 96
XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80
Note 1) Dimension E applies when heater option is included. (Lead wire length: approx. 1 m) Note 2) (a), (b) and (c) in the above drawing indicate heater mounting positions. Moreover, heater mounting positions will differ depending on the type of...
