STMicroelectronics AIS326DQ
The AIS326DQ is a three axes digital output accelerometer that includes a sensing element and an IC interface able to take the information from the sensing element and to provide the measured acceleration signals to the external world through an SPI serial interface. The sensing element, capable of detecting the acceleration, is manufactured using a dedicated QFPN-28 process developed by ST to produce inertial sensors and actuators in silicon. The IC interface instead is manufactured using a CMOS process that allows high level of integration to design a dedicated circuit which is factory trimmed to better match the sensing element characteristics.