STMicroelectronics LIS2L01
The LIS2L01 is a dual channel accelerometer that includes a sensor elements and an IC interface able to take the information from the sensor and to provide an analog signal to the external world. The sensor element, capable to detect the acceleration, is manufactured using a dedicated process called ThELMA (Thick Epi-Poly layer for Microactuators and Accelerometers) developed by ST to produce inertial sensor and actuator in silicon. The IC interface instead is manufactured using a CMOS process that allow high level of integration to design a dedicated circuit which is trimmed to better match the sensor element characteristics.