STMicroelectronics LIS3DHH
MEMS motion sensor
APPLICATIONS
● Precision inclinometer● Platform and antenna stabilization
● Leveling instruments Ceramic cavity LGA-16 (5x5x1.7 mm)
FEATURES
● 3-axis, ±2.5 g full-scale● Ultra-low noise performance: 45 μg/√Hz
● Excellent stability over temperature (<0.4 mg/°C) and time
● 16-bit data output
● SPI 4-wire digital output interface
● Embedded temperature sensor
● 12-bit temperature data output
● Embedded FIFO (depth 32 levels)
● High shock survivability
● Extended operating temperature range (-40 °C to +85 °C)
● ECOPACK®, RoHS and “Green” compliant
DESCRIPTION
The LIS3DHH is an ultra-high-resolution and lownoise three-axis linear accelerometer. The LIS3DHH has a full scale of 2.5 g and is capable of providing the measured accelerations to the application through an SPI 4-wire digital interface. The sensing element is manufactured using a dedicated micromachining process developed by STMicroelectronics to produce inertial sensors and actuators on silicon wafers. The IC interface is manufa...