STMicroelectronics LIS3L02DS
The LIS3L02DS is a tri-axis digital output linear accelerometer that includes a sensing element and an IC interface able to take the information from the sensing element and to provide the measured acceleration signals to the external world through an I2C/SPI serial interface. The sensing element, capable to detect the acceleration, is manufactured using a dedicated process called THELMA (Thick Epi-Poly Layer for Microactuators and Accelerometers) developed by ST to produce inertial sensors and actuators in silicon. The IC interface instead is manufactured using a CMOS process that allows high level of integration to design a dedicated circuit which is factory trimmed to better match the sensing element characteristics.