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Silicon Piezoresistive Absolute Pressure Sensor Preliminary Data
Features • • • • Low pressure and temperature hysteresis Fast response High sensitivity and linearity Fatigue free monocrystaline silicon diaphragm giving high load cycle stability • High long term stability • Built in silicon temperature sensor • Provided for further fabrication, protection cap Type and Marking KPY 62 AK KPY 63 AK KPY 64 AK KPY 65 AK KPY 66 AK KPY 67 AK KPY 68 AK KPY 69 AK Pin Configuration 1 2 3 4 5 6 7 8 Temperature sensor (typ. R25 = 2 kΩ) Not connected + VIN; Temperature sensor − VOUT Capillary tube Shielding, to be connected to + VIN − VIN + VOUT Symbol Pressure Range 0 … 0.6 0 … 1.